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Design principles for metallization formulations of ceramic substrates

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  Ceramic metallization is a very important process skill of ceramics. The metal sealing technology of ceramic substrates is formed and developed by many scientific crosses. It is the application and extension of data. It is a highly technical and practical substrate. skill. Today, Xiaobian’s primary share is the “planning principle for metallization of ceramic substrates”.

Ceramic substrate

  DBC ceramic substrate

  The metallization planning principle of ceramic substrates is inseparable from the packaging principle. The primary mechanism of the activated Mo-Mn method widely used at home and abroad is the relocation of the activator glass phase. Due to the development and wide application of XPS and AES in the 1980s, people took the lead in using the above-mentioned modern surface analysis skills to analyze and determine the surface chemical state of the metallized layer Mo, and found that the surface is not pure metal Mo, but An oxide film of about 200 nm thick is formed in the metallization process. This oxide film is very important for the airtightness and strength of the sealing component. Therefore, the existence of the chemical state of Mo surface oxidation is an important part of the mechanism of the activated Mo-Mn method.

  The component of the metallization formulation of the ceramic substrate proposes the concept of “three elements”, that is, SiO2, aluminum oxide and MnO should generally exist in the general metallization formula. Because of the existence of the oxidation state of the surface of Mo, the explanation and research sealing is very It is important. For example, this can explain the importance and materialization significance of the introduction of SiO2 in the general Mo-Mn method. It has been proved that the presence of SiO2 improves the moisturization of the glass phase and the Mo particles, the probability of cracking from the metallization layer is reduced, and the sealing strength is correspondingly improved. Therefore, it is preferable to select a wet hydrogen atmosphere, which is not only a requirement for Mn to become MnO, but also a demand for an oxide film of MoO2. In particular, the single bond strength of SiO2 is 444KJ/mol, which is a glass forming body and a matrix and skeleton of the activator. It is similar to the chemical properties of MoO2 and is beneficial to moisture. The importance is obvious.

  The metallization of ceramic substrate has introduced three kinds of MnO into the metallization formula: 1. As a sealing agent, it can react with some metals to improve the sealing strength; 2. Decrease the high temperature viscosity of the glass, so that The metallization temperature drops; 3, lowering the surface tension of the glass and increasing the moisture of the glass melt on the metal surface.

  In general, the sealing mechanism involved includes material structure, chemical thermodynamics and chemical kinetics. This is the primary content of physical chemistry. Therefore, it can be considered that the mechanism of activation of Mo-Mn is a physicochemical reaction mechanism. From this mechanism, it was confirmed that the three primary components of the general formulation were aluminum oxide, SiO2 and MnO. Among them, the effect of Al2O3 is firstly to improve the sealing strength, while SiO2 and MnO are mainly used to improve the moisturizing and lowering viscosity.

  In summary, the metallization of ceramic substrates should consider the concept of “three elements” in terms of formula composition planning. In terms of performance, the expansion coefficient, solubility and moisturizing properties of the activator glass phase should be considered, and more ceramic metallization Questions can be consulted.
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